Oxide film assisted dopant diffusion in silicon carbide

Journal

Thin Solid Films

ISSN

0040-6090

Date Issued

2010-10

Author(s)

Chin-Che Tin

Suwan Mendis

Kerlit Chew

Ilkham Atabaev

Tojiddin Saliev

Erkin Bakhranov

Bakhtiyar Atabaev

Victor Adedeji

DOI

10.1016/j.tsf.2010.03.107

File(s)

Name

Journal Article.png

Size

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Format

PNG

Checksum

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