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Silicon-on-Insulator Substrates with Buried Ground Planes (GPSOI)
Journal
NATO Science Series II: Mathematics, Physics and Chemistry
Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment
Date Issued
2005
Author(s)
M. Bain
S. Stefanos
P. Baine
S.H. Loh
J.H. Montgomery
B.M. Armstrong
H.S. Gamble
J. Hamel
D.W. McNeill
M. Kraft
H. Kemhadjian
DOI
https://doi.org/10.1007/1-4020-3013-4_30
File(s)
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Format
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Checksum
(MD5):6459b36f69f027e855edacb3be8e57e9