Y.K. CheongW.H. LimS.H. LeeC.H. PuaW.Y. ChongH. Ahmad2025-01-022025-01-022016-0210.1016/j.ijleo.2015.11.057https://dspace-cris.utar.edu.my/handle/123456789/9621405 nm laser processing of thin SU-8 polymer filmjournal-article