Chin-Che TinSuwan MendisKerlit ChewIlkham AtabaevTojiddin SalievErkin BakhranovBakhtiyar AtabaevVictor Adedeji2024-12-242024-12-242010-1010.1016/j.tsf.2010.03.107https://dspace-cris.utar.edu.my/handle/123456789/7835Oxide film assisted dopant diffusion in silicon carbidejournal-article